JPH0453092B2 - - Google Patents

Info

Publication number
JPH0453092B2
JPH0453092B2 JP60285336A JP28533685A JPH0453092B2 JP H0453092 B2 JPH0453092 B2 JP H0453092B2 JP 60285336 A JP60285336 A JP 60285336A JP 28533685 A JP28533685 A JP 28533685A JP H0453092 B2 JPH0453092 B2 JP H0453092B2
Authority
JP
Japan
Prior art keywords
furnace body
heating element
wall surface
heating
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60285336A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62144334A (ja
Inventor
Shunichi Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP28533685A priority Critical patent/JPS62144334A/ja
Publication of JPS62144334A publication Critical patent/JPS62144334A/ja
Publication of JPH0453092B2 publication Critical patent/JPH0453092B2/ja
Granted legal-status Critical Current

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  • Furnace Details (AREA)
JP28533685A 1985-12-18 1985-12-18 光学的人工器官及びその製造法 Granted JPS62144334A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28533685A JPS62144334A (ja) 1985-12-18 1985-12-18 光学的人工器官及びその製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28533685A JPS62144334A (ja) 1985-12-18 1985-12-18 光学的人工器官及びその製造法

Publications (2)

Publication Number Publication Date
JPS62144334A JPS62144334A (ja) 1987-06-27
JPH0453092B2 true JPH0453092B2 (en]) 1992-08-25

Family

ID=17690230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28533685A Granted JPS62144334A (ja) 1985-12-18 1985-12-18 光学的人工器官及びその製造法

Country Status (1)

Country Link
JP (1) JPS62144334A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2760855B2 (ja) * 1989-08-12 1998-06-04 宮城沖電気株式会社 半導体製造用熱処理装置における発熱体構造及び半導体装置の熱処理方法
JP2011091386A (ja) * 2009-09-24 2011-05-06 Semiconductor Energy Lab Co Ltd 熱処理装置、熱処理方法及び半導体装置の作製方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854636Y2 (ja) * 1979-08-23 1983-12-13 株式会社リケン ヒ−タ埋設耐火物成形体の炉内支持構造
JPS61287223A (ja) * 1985-06-14 1986-12-17 Fujitsu Ltd 熱処理炉

Also Published As

Publication number Publication date
JPS62144334A (ja) 1987-06-27

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